Hexamethyldisilazane CAS No. 999-97-3

Name: 1,1,1,3,3,3-Hexamethyldisilazane
CAS: 999-97-3
Molecular Formula: C6H19NSi2
Molecular Weight: 161.39

Names and Identifiers

Name 1,1,1,3,3,3-Hexamethyldisilazane
Synonyms HMDS; Hexamethyldisilazane; DYNASYLAN HMDS; Bis(trimethylsilyl)amine;


CAS 999-97-3
EINECS 213-668-5
InChI InChI=1/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3

Physico-chemical Properties

Molecular Formula C6H19NSi2
Molar Mass 161.39 g/mol
Density 0.765
Melting Point -78℃
Boling Point 125℃
Flash Point 20℃
Solubility REACTS
Refractive Index 1.4069

Risk and Safety

Hazard Symbols F – Flammable

C – Corrosive
Risk Codes R11 – Highly Flammable
R20/21/22 – Harmful by inhalation, in contact with skin and if swallowed.
R34 – Causes burns
Safety Description S16 – Keep away from sources of ignition.
S26 – In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.
S36/37/39 – Wear suitable protective clothing, gloves and eye/face protection.
S45 – In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.)